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メディア授業とは，メディアを利用して遠隔方式により実施する授業の授業時数が，総授業時数の半数を超える授業をいいます。
メディア授業により取得した単位は，卒業要件として修得すべき単位のうち60単位を超えないものとされています。
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MEMS (Micro Electro Mechanical Systems) is useful as well as industrial products in medical care or a biofield. It is explained a design theory of the MEMS and micro/nanofabrication technology on the basis of semiconductor microfabrication technology used for the production, the physical and chemical matter becoming basic, and the characteristic and application in this lecture.
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Perspectives of Knowledge and Understanding:
・They can explain physical and chemical phenomena and physical and a chemical model in micromachining.
・They understand various processing methods and can explain a way of the use of the processing principle (physics, chemistry).
・They can explain a shape that can be processed and usage, usefulness in the micromachine production.
Perspectives on Thinking and Judgment:
・They can propose simple micromachine structure.
・They can propose application of the micro/nanofabrication technology for the reality problem.
・They can design and calculate the properties fundamentally.
Perspective of interest and motivation:
・They are interested in a production technology of the personal article and being able to think to compare it with one's knowledge.
・They are able to nominate plural things produced in a same production technology.
・They can learn it with will to apply micromachining technology and micromachine structure to their own study.
Perspectives on Attitudes:
・They can work on a report problem spontaneously, independently and positively.
Perspectives on Skills and Expressions:
・They can collect the information about the speciality.
・They can express and explain a three-dimensional shape precisely by using a figure and an appropriate sentence.
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They learn about the fabrication of the micromachine and a dominant physical law. They learn also about physical and chemical processing principle using atom, molecules, ion, photon. The micromachining method using them, and micromachine which were really produced are also explained.
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第1回
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Introduction
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Micro/nanomachinig
Scaling
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第2回
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Photolithography
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Making the micro/nano pattern and transcribing technology
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第3回
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Photolithography
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Making the micro/nano pattern and transcribing technology
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第4回
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Etching
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Removal processing of micro/nano pattern
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第5回
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Etching
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Removal processing of micro/nano pattern
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第6回
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Thin film deposition
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Fundamentals of thin film.
Thermal oxidation
Chemical vapor deposition
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第7回
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Thin film deposition
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Evaporation, Sputtering
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第8回
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Micromachining
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Special micromachining technique
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第9回
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Thin film deposition
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Scaling law
Electrostatic force
Stress in film
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第10回
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Design of MEMS device
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Design of MEMS device
Examples of Microsensors, Microactuators
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第11回
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Applications of MEMS devices
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Microactuators
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第12回
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Applications of MEMS devices
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Microfluidic devices
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第13回
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Biomedical applications of MEMS devices
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Cell analysis using MEMS devices
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第14回
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Biomedical applications of MEMS devices
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Motor proteins and micro fabrications
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第15回
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Summary
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Review and summarize contents of learning.
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※AL（アクティブ・ラーニング）欄に関する注
・授業全体で、AL（アクティブ・ラーニング）が占める時間の割合を、それぞれの項目ごとに示しています。
・A〜Dのアルファベットは、以下の学修形態を指しています。
【A：グループワーク】、【B：ディスカッション・ディベート】、【C：フィールドワーク（実験・実習、演習を含む）】、【D：プレゼンテーション】
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A: --% B: --% C: --% D: --%
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The mini tests are 20%, and two reports are 80%.
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備考
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Pdf documents will be distributed.
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| (インフラ、産業化、イノベーション)強靱（レジリエント）なインフラ構築、包摂的かつ持続可能な産業化の促進及びイノベーションの推進を図る。 |
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Kazuyuki Minami
Mechanical Engineering
E-mail: minamik[at]yamaguchi-u.ac.jp
Tasuku Nakahara
Mechanical Engineering
E-mail: tasuku[at]yamaguchi-u.ac.jp
*Exchange [at] by @ for sending e- mail.
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Interviews are conveniently scheduled on Wednesday afternoons.
Email me to set up an appointment for an interview.
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