タイトル

開講年度 開講学部等
2026 大学院創成科学研究科（博士前期）
開講学期 曜日時限 授業形態 AL（アクティブ・ラーニング）ポイント
前期 水5～6 講義  
時間割番号 科目名[英文名] 使用言語 単位数
3261120120 微小機械創成学特論[Design and Fabrication of Micro Electro Mechanical Systems] 日本語 2
担当教員（責任）[ローマ字表記] メディア授業
中原 佐[NAKAHARA Tasuku] ー
担当教員[ローマ字表記]
中原 佐　[NAKAHARA Tasuku]
特定科目区分   対象学生   対象年次  
ディプロマ・ポリシーに関わる項目 カリキュラムマップ(授業科目とDPとの対応関係はこちらから閲覧できます)
授業の目的と概要
MEMS (Micro Electro Mechanical Systems) is useful as well as industrial products in medical care or a biofield. It is explained a design theory of the MEMS and micro/nanofabrication technology on the basis of semiconductor microfabrication technology used for the production, the physical and chemical matter becoming basic, and the characteristic and application in this lecture.
授業の到達目標
Knowledge and Understanding
・Explain the physical and chemical phenomena and models involved in microfabrication.
・Understand various fabrication methods and explain the application of their physical and chemical principles.
・Explain fabricable shapes and their utility and application in micromachine fabrication.
・Explain design methods for micromachines produced using microfabrication technology.
・Explain the dominant physical laws that must be considered in micromachine design.

Thinking and Judgment
・Propose simple micromachine structures.
・Propose applications of microfabrication technology to solve real-world problems.
・Perform basic design and calculations.

Interest and Motivation
・Take an interest in everyday items manufactured using microfabrication technology and relate them to acquired knowledge.
・Identify multiple examples of products manufactured using the same fabrication techniques.
・Demonstrate a willingness to learn with the intention of applying microfabrication technology and micromachine structures to one's own research.

Attitude
・Engage proactively and independently in report assignments.

Skills and Expression
・Accurately gather information regarding specialized knowledge.
・Accurately represent three-dimensional shapes using diagrams and explain them with appropriate text.
授業計画
【全体】
They learn about the fabrication of the micromachine and a dominant physical law. They learn also about physical and chemical processing principle using atom, molecules, ion, photon. The micromachining method using them, and micromachine which were really produced are also explained.
項目 内容 授業時間外学習 備考
第1回 Introduction Micro/nanomachinig
Scaling 		Perform total 4-hour preparations for lessons and review along a class plan.
第2回 Photolithography Making the micro/nano pattern and transcribing technology Perform total 4-hour preparations for lessons and review along a class plan.
第3回 Photolithography Making the micro/nano pattern and transcribing technology Perform total 4-hour preparations for lessons and review along a class plan.
第4回 Etching Removal processing of micro/nano pattern Perform total 4-hour preparations for lessons and review along a class plan.
第5回 Etching Removal processing of micro/nano pattern ・Perform total 4-hour preparations for lessons and review along a class plan.
・Begin making of the 1st report problem according to instructions. Spend two hours or more on the making of the report.
第6回 Thin film deposition Fundamentals of thin film.
Thermal oxidation
Chemical vapor deposition 		Perform total 4-hour preparations for lessons and review along a class plan.
第7回 Thin film deposition Evaporation, Sputtering Perform total 4-hour preparations for lessons and review along a class plan.
第8回 Micromachining Special micromachining technique Perform total 4-hour preparations for lessons and review along a class plan.
第9回 Thin film deposition Scaling law
Electrostatic force
Stress in film 		Perform total 4-hour preparations for lessons and review along a class plan.
第10回 Design of MEMS device Design of MEMS device
Examples of Microsensors, Microactuators 		・Perform total 4-hour preparations for lessons and review along a class plan.
・Begin making of the 2nd report problem according to instructions. Spend two hours or more on the making of the report.
第11回 Applications of MEMS devices Microactuators Perform total 4-hour preparations for lessons and review along a class plan.
第12回 Applications of MEMS devices Microfluidic devices Perform total 4-hour preparations for lessons and review along a class plan.
第13回 Biomedical applications of MEMS devices Cell analysis using MEMS devices Perform total 4-hour preparations for lessons and review along a class plan.
第14回 Biomedical applications of MEMS devices Motor proteins and micro fabrications Perform total 4-hour preparations for lessons and review along a class plan.
第15回 Summary Review and summarize contents of learning. Perform total 4-hour for review.
※AL（アクティブ・ラーニング）欄に関する注
・授業全体で、AL（アクティブ・ラーニング）が占める時間の割合を、それぞれの項目ごとに示しています。
・A〜Dのアルファベットは、以下の学修形態を指しています。
【A：グループワーク】、【B：ディスカッション・ディベート】、【C：フィールドワーク（実験・実習、演習を含む）】、【D：プレゼンテーション】
A: --%　B: --%　C: --%　D: --%
成績評価法
The mini tests are 20%, and two reports are 80%.
教科書にかかわる情報
備考
Pdf documents will be distributed.
参考書にかかわる情報
参考書 書名 マイクロマシーニングとマイクロメカトロニクス ISBN 9784563034702
著者名 五十嵐伊勢美　他 出版社 培風館 出版年 1992
参考書 書名 マイクロ加工の物理と応用　応用物理学選書８ ISBN 9784785325084
著者名 吉田善一 出版社 裳華房 出版年 1998
参考書 書名 マイクロ・ナノマシン技術入門 ISBN 9784769371175
著者名 藤田博之 出版社 工業調査会 出版年 2003
参考書 書名 超微細加工の基礎 : 電子デバイスプロセス技術 ISBN 9784526048128
著者名 麻蒔立男著 出版社 日刊工業新聞社 出版年 2001
備考
メッセージ
キーワード
持続可能な開発目標（SDGs）

  • 産業と技術革新の基盤をつくろう
(インフラ、産業化、イノベーション)強靱（レジリエント）なインフラ構築、包摂的かつ持続可能な産業化の促進及びイノベーションの推進を図る。
関連科目
履修条件
連絡先
Tasuku Nakahara
Mechanical Engineering
E-mail: tasuku[at]yamaguchi-u.ac.jp

*Exchange [at] by @ for sending e- mail.
オフィスアワー
Interviews are conveniently scheduled on Wednesday afternoons.
Email me to set up an appointment for an interview.

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