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メディア授業とは，メディアを利用して遠隔方式により実施する授業の授業時数が，総授業時数の半数を超える授業をいいます。
メディア授業により取得した単位は，卒業要件として修得すべき単位のうち60単位を超えないものとされています。
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Vacuum technology is widely used in various fields such as electronics, mechanics, chemistry, food and medicine. By acquiring knowledge and understanding of vacuum technology and its applications, students acquire the skills that form the basis of electronic device engineering, such as thin-film formation and microfabrication. In this course, students learn about vacuum engineering as a foundation.
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To understand 'gas molecular kinetics', 'gas flow' and 'gas adsorption phenomena' as a basis for vacuum engineering.
To acquire knowledge of vacuum components such as vacuum pumps and vacuum gauges.
To understand the fundamentals of vacuum engineering and vacuum components and be able to think about vacuum evacuation processes in simple vacuum systems.
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Three lectures on 'gas molecular kinetics', 'gas flow' and 'gas adsorption phenomena' are given as the fundamentals of vacuum engineering. These fundamentals of vacuum engineering are then used to explain vacuum systems. The vacuum components such as 'vacuum materials', 'vacuum pumps', 'vacuum gauges' and 'vacuum components and operating mechanisms' are explained in four lectures.
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第1回
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Fundamentals of vacuum engineering I
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Gas molecular kinetics: motion of gases in a vacuum, including pressure, gas velocity, mean free path and frequency of incidence.
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第2回
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Fundamentals of vacuum engineering Ⅱ
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Gas flows: viscous, intermediate and molecular gas flows and conductance.
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第3回
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Fundamentals of vacuum engineering Ⅲ
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Gases and solid surfaces: vacuum evacuation processes and adsorption of gases on solid surfaces, including physisorption and chemisorption.
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第4回
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vacuum system
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Explanation of the construction of vacuum systems using the fundamentals of vacuum engineering.
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第5回
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Vacuum materials
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Describes vacuum materials from the perspective of gas desorption.
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第6回
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Vacuum pumps
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Describes the classification of vacuum pumps and the principles, features and use of various vacuum pumps.
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第7回
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Vacuum measurement
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Classification of vacuum gauges based on measurement principles and explanation of the principles, features and use of various vacuum gauges.
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第8回
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Vacuum components and operating mechanisms
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Various vacuum components such as vacuum valves, linear and rotary introducers and vacuum piping components are described.
The Final exams will be held.
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※AL（アクティブ・ラーニング）欄に関する注
・授業全体で、AL（アクティブ・ラーニング）が占める時間の割合を、それぞれの項目ごとに示しています。
・A〜Dのアルファベットは、以下の学修形態を指しています。
【A：グループワーク】、【B：ディスカッション・ディベート】、【C：フィールドワーク（実験・実習、演習を含む）】、【D：プレゼンテーション】
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A: --% B: --% C: --% D: --%
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Evaluation is based on the 8th test (40%) and in-class (30%) and out-of-class (30%) reports.
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備考
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Slide materials will be distributed.
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Students who use vacuum equipment in their research are directly involved in this subject. Students are expected to actively participate in this course so that it will be useful for their research.
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Pressure, gas flow, adsorption, vacuum, vacuum pumps, vacuum measurement, vacuum systems
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| (経済成長と雇用)包摂的かつ持続可能な経済成長及びすべての人々の完全かつ生産的な雇用と働きがいのある人間らしい雇用（ディーセント・ワーク）を促進する。 |
| (インフラ、産業化、イノベーション)強靱（レジリエント）なインフラ構築、包摂的かつ持続可能な産業化の促進及びイノベーションの推進を図る。 |
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nagahama@yamaguchi-u.ac.jp
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Please make an appointment in advance by email.
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